Seeing and measuring the impossible
VIEW offers a full line of optical metrology systems for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.
Precis 200
The all-new Precis® 200 incorporates the most advanced design and technology from VIEW. Based on the proven Innova wafer metrology system from Micro-Metric, the new Precis includes a number of configurable options that make the system more versatile, serviceable and reliable:
State-of-the-art linear motion control technology provides the fastest, most reliable platform available for high capacity operation in production environments ranging from clean rooms to factory floors.
- Extended Z-axis range – 2.5mm, 5mm or 100mm
- Integral electronics drawer – fully compliant with SEMI S2 and CE standards
- Ergonomic operator control station with hide-away keyboard tray, adjustable height and angle for control panel and display monitor, SEMI S8 compliant
- Fully automated microscope with all settings computer controlled
- • MMWin – wafer and mask metrology software – ideal for critical dimension and overlay registration measurement for wafers, slider ABS, photomask and flat panel displays.
| Standard | Optional | |
|---|---|---|
| X,Y,Z Travel | 200x200x5 mm | |
| Load Capacity | 12 kg | |
| Imaging Optics | Microscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret, and camera back tube | |
| Front Lens (Field Interchangable) | 10X Bright Field 50X Long Working Distance, Bright Field | 5X Bright Field or Bright Field/Dark Field 10X Bright Field or Bright Field/Dark Field 20X Long Working Distance, Bright Field or Bright Field/Dark Field 50X Long Working Distance, Bright Field or Bright Field/Dark Field |
| Metrology Camera | 1.4 megapixel, 1/2 inch, digital monochrome | 2.0 megapixel, digital, monochrome |
| Illumination | All LED coaxial through-the-lens surface light and below-the-stage back light | Multi-color programmable ring light Grid autofocus system |
| Sensor Options | Integrated photo spectrometer for photoresist and thin film thickness measurements |